ICP的(de)形(xing)成(cheng)就是(shi)工作氣(qi)體的(de)電(dian)離過程。為了形(xing)成(cheng)穩定的(de)ICP炬焰需要四(si)個條(tiao)件：   高(gao)頻高(gao)強度的電磁場  ，工作氣(qi)體 ，維(wei)持氣體穩定放電的石英矩管 ，電(dian)子離子源     
矩(ju)管(guan)是(shi)由直徑20mm的三重(zhong)同心石英(ying)管(guan)構成(cheng)(cheng)。石英(ying)外管(guan)和中間管(guan)之間同10~20L/min的氬氣(qi)(qi)(qi)(qi)，其作用(yong)是(shi)作為工作氣(qi)(qi)(qi)(qi)體(ti)形成(cheng)(cheng)等離(li)子(zi)體(ti)并冷卻石英(ying)矩(ju)管(guan)，稱為等離(li)子(zi)體(ti)氣(qi)(qi)(qi)(qi)或冷卻氣(qi)(qi)(qi)(qi)。中間管(guan)和中心管(guan)通入05~1.5L/min氬氣(qi)(qi)(qi)(qi)，稱為輔助氣(qi)(qi)(qi)(qi)，用(yong)以輔助等離(li)子(zi)體(ti)的形成(cheng)(cheng)。中心管(guan)用(yong)于導入試樣氣(qi)(qi)(qi)(qi)溶(rong)膠。石英(ying)矩(ju)管(guan)外套有高頻感應(ying)線圈，感應(ying)圈一般為2~4圈空心銅管(guan)。
         形(xing)(xing)成ICP焰炬(ju)(ju)通稱為點火(huo)。點火(huo)分三步(bu)：*步(bu)是向(xiang)外(wai)管(guan)及中管(guan)通入(ru)等(deng)離(li)子(zi)(zi)體(ti)和(he)輔助氣(qi)，此時中心(xin)管(guan)不通氣(qi)體(ti)，在(zai)矩管(guan)中建立氬氣(qi)氣(qi)氛(fen)；第二部(bu)(bu)向(xiang)感應線圈(quan)接入(ru)高頻(pin)電(dian)(dian)(dian)(dian)源，一(yi)般頻(pin)率為27~40MHz，電(dian)(dian)(dian)(dian)源功率為1~1.5KW，此時線圈(quan)內(nei)(nei)有高頻(pin)電(dian)(dian)(dian)(dian)流(liu)及由(you)它產(chan)(chan)生(sheng)(sheng)的(de)(de)高頻(pin)電(dian)(dian)(dian)(dian)磁(ci)場(chang)。由(you)于(yu)在(zai)室(shi)溫下(xia)干燥的(de)(de)氬氣(qi)并不導電(dian)(dian)(dian)(dian)，不會在(zai)氬氣(qi)中產(chan)(chan)生(sheng)(sheng)感應電(dian)(dian)(dian)(dian)流(liu)，必須用其他方(fang)法(fa)(fa)(fa)使(shi)(shi)(shi)氬氣(qi)局部(bu)(bu)電(dian)(dian)(dian)(dian)離(li)成為導體(ti)。高頻(pin)電(dian)(dian)(dian)(dian)磁(ci)場(chang)才能使(shi)(shi)(shi)它進(jin)一(yi)步(bu)電(dian)(dian)(dian)(dian)離(li)形(xing)(xing)成等(deng)離(li)子(zi)(zi)體(ti)。使(shi)(shi)(shi)氬氣(qi)部(bu)(bu)分電(dian)(dian)(dian)(dian)離(li)的(de)(de)方(fang)法(fa)(fa)(fa)有兩種(zhong)，一(yi)種(zhong)是石墨棒(bang)加(jia)熱法(fa)(fa)(fa)，目前多(duo)用能產(chan)(chan)生(sheng)(sheng)放(fang)電(dian)(dian)(dian)(dian)的(de)(de)高壓Tesla線圈(quan)，在(zai)管(guan)內(nei)(nei)氬氣(qi)流(liu)中形(xing)(xing)成放(fang)電(dian)(dian)(dian)(dian)，使(shi)(shi)(shi)氬氣(qi)局部(bu)(bu)電(dian)(dian)(dian)(dian)離(li)為導電(dian)(dian)(dian)(dian)體(ti)，并進(jin)而產(chan)(chan)生(sheng)(sheng)感應電(dian)(dian)(dian)(dian)流(liu)。感應電(dian)(dian)(dian)(dian)流(liu)加(jia)熱氣(qi)體(ti)，形(xing)(xing)成火(huo)炬(ju)(ju)狀 ICP炬(ju)(ju)焰。